Special Section on Photonic Devices using Nanofabrication Technology and Their Applications
Wavelength Trimming of Micro-Machined VCSELs
2012 Volume E95.C Issue 2 Pages 237-242
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2012 Volume E95.C Issue 2 Pages 237-242
We demonstrate the wavelength trimming of MEMS VCSELs by etching a cantilever-shaped top mirror using FIB etching. The proposed technique can be used for the post-process precise wavelength allocation of athermal MEMS VCSELs. The modeling and experimental results on 850nm MEMS VCSELs are presented. The results show a possibility of realizing both red-shift and blue-shift wavelength changes by choosing the etching area of the cantilever.
