It is shown that it is feasible to apply 0.5-V 6-T SRAM cells in a 25-nm high-speed 1-Gb e-SRAM. In particular, for coping with rapidly reduced voltage margin as V_DD is reduced, a boosted word-voltage scheme is first proposed. Second, V_t variations are reduced with repair techniques and nanoscale FD-MOSFETs to further widen the voltage margin. Third, a worst case design is developed, for the first time, to evaluate the cell. This design features a dynamic margin analysis and takes subthreshold current, temperature, and V_t variations and their combination in the cell into account. Fourth, the proposed scheme is evaluated by applying the worst-case design and a 25-nm planar FD-SOI MOSFET. It is consequently found that the scheme provides a wide margin and high speed even at 0.5V. A 0.5-V high-speed 25-nm 1-Gb SRAM is thus feasible. Finally, to further improve the scheme, it is shown that it is necessary to use FinFETs and suppress and compensate process, voltage, and temperature variations in a chip and wafer.