2012 Volume E95.C Issue 5 Pages 837-841
We propose a new three-dimensional (3D) NAND flash memory array having Tied Bit-line and Ground Select Transistor (TiGer) [1]. Channels are stacked in the vertical direction to increase the memory density without the device size scaling. To distinguish stacked channels, a novel operation scheme is introduced instead of adding supplementary control gates. The stacked layers are selected by using ground select line (GSL) and common source line (CSL). Device structure and fabrication process are described. Operation scheme and simulation results for program inhibition are also discussed.
