This paper presents a measurement circuit structure for capturing SET pulse-width suppressing pulse-width modulation and within-die process variation effects. For mitigating pulse-width modulation while maintaining area efficiency, the proposed circuit uses massively parallelized short inverter chains as a target circuit. Moreover, for each inverter chain on each die, pulse-width calibration is performed. In measurements, narrow SET pulses ranging 5ps to 215ps were obtained. We confirm that an overestimation of pulse-width may happen when ignoring die-to-die and within-die variation of the measurement circuit. Our evaluation results thus point out that calibration for within-die variation in addition to die-to-die variation of the measurement circuit is indispensable.