PUF (Physically Unclonable Function) technologies attract attention as a candidate to prevent counterfeit chips. A latch PUF is known as a high performance PUF among various types of proposed PUFs. In this paper we describe an experiment on a invasive attack to a latch PUF consisting of RS latches, such as measuring the latch output by a probe contact after a FIB (Focused Ion Beam) processing. As a result, we confirmed that the latch PUF has a tolerance for the dynamic analysis, because the RS latch output was influenced and changed after the FIB processing in our experiments.