Abstract
A planar capacitive sensor (PCS) capable of 2D large-scale measurement is presented in this paper. Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate. By accumulating the number of quarters in each direction and the specific position in the final quarter, the large-scale measurement is fulfilled. Displacements in X- and Y-direction can be measured independently and simultaneously. Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity. Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm. An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed. The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors.
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References
Baxter, L.K., 1997. Capacitive Sensors: Design and Applications. IEEE Press, Piscataway, NJ.
Benedek, P., Silvester, P., 1972. Capacitance of parallel rectangular plates separated by a dielectric sheet. IEEE Trans. Microw. Theory Tech., 20(8):504–510. [doi:10.1109/TMTT.1972.1127797]
Bonse, M.H.W., Zhu, F., Spronck, J.W., 1994. A new two-dimensional capacitive position transducer. Sens. Actuat. A, 41(1-3):29–32. [doi:10.1016/0924-4247(94)80082-0]
Chang, S., Lee, J., 2010. Design of a long range nano-scale resolution mechanism. J. Zhejiang Univ.-Sci. A (Appl. Phys. & Eng.), 11(4):250–254. [doi:10.1631/jzus.A1000 029]
Furuichi, H., Fearing, R.S., 1996. A Planar Capacitive Micro Positioning Sensor. Proc. 7th Int. Symp. on Micro Machine and Human Science, p.85–90. [doi:10.1109/MHS.1996.563406]
Huang, X.H., Lee, J.I., Ramakrishnan, N., Bedillion, M., Chu, P., 2010. Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor. Mechatronics, 20(1): 27–34. [doi:10.1016/j.mechatronics.2009.06.005]
Kim, M., Moon, W., 2006. A new linear encoder-like capacitive displacement sensor. Measurement, 39(6):481–489. [doi:10.1016/j.measurement.2005.12.012]
Kolb, P.W., Decca, R.S., Drew, H.D., 1998. Capacitive sensor for micropositioning in two dimensions. Rev. Sci. Instrum., 69(1):310–312. [doi:10.1063/1.1148515]
Kuijpers, A.A., Krijnen, G.J.M., Wiegerink, R.J., Lammerink, T.S.J., Elwenspoek, M., 2006. A micromachined capacitive incremental position sensor. J. Micromech. Microeng., 16(6):S116–124. [doi:10.1088/0960-1317/16/6/S18]
Meyer, H.U., 1996. An integrated capacitive position sensor. IEEE Trans. Instrum. Meas., 45(2):521–525. [doi:10.1109/19.492779]
Pedrocchi, A., Hoen, S., Ferrigno, G., Pedotti, A., 2000. Perspectives on MEMS in bioengineering: a novel capacitive position microsensor. IEEE Trans. Biomed. Eng., 47(1):8–11. [doi:10.1109/10.817612]
Picotto, G.B., Pisani, M., Sosso, A., 2009. A multi-electrode plane capacitive sensor for displacement measurements and attitude controls. Meas. Sci. Technol., 20(8):1–4. [doi:10.1088/0957-0233/20/8/084011]
Tolles, W.M., 1996. Nanoscience and nanotechnology in Europe. Nanotechnology, 7(2):59–105. [doi:10.1088/0957-4484/7/2/001]
Wang, W., Li, X.X., Chen, Z.C., 2008. A planar capacitive sensor for large scale measurement. Key Eng. Mater., 381–382:509–512. [doi:10.4028/KEM.381-382.509]
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Project supported by the National Natural Science Foundation of China (No. 51275465), the National Basic Research Program (973) of China (No. 2011CB013300), and the Scientific Research Foundation for the Returned Overseas Chinese Scholars, Ministry of Education, China (No. [2011]1568)
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Yu, Jp., Wang, W., Lu, Kq. et al. A planar capacitive sensor for 2D long-range displacement measurement. J. Zhejiang Univ. - Sci. C 14, 252–257 (2013). https://doi.org/10.1631/jzus.C12MNT03
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DOI: https://doi.org/10.1631/jzus.C12MNT03