Abstract
A micromachining technique is presented for the fabrication of resin-bonded permanent magnets in the microscale. Magnetic paste is prepared from NdFeB powder and an epoxy resin, filled into lithographically defined photoresist molds or metal molds, and formed into resin-bonded magnets after curing at room temperature. A coercivity of 772.4 kA/m, a remanence of 0.27 T, and a maximum energy product of 22.6 kJ/m3 have been achieved in an NdFeB disk micromagnet with dimensions of Φ200 μm×70 μm. Based on the developed micro-patterning of resin-bonded magnets, a fully integrated electromagnetic vibration energy harvester has been designed and fabricated. The dimensions of the energy harvester are only 4.5 mm×4.5 mm×1.0 mm, and those of the micromagnet are 1.5 mm×1.5 mm×0.2 mm. This microfabrication technique can be used for producing permanent magnets tens or hundreds of micrometers in size for use in various magnetic devices.
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Project supported by the National Natural Science Foundation of China (No. 51007001), the 211 Project of Anhui University, and the Start Up Grant for Doctor’s Research of Anhui University, China
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Wang, Ph., Tao, K., Yang, Zq. et al. Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters. J. Zhejiang Univ. - Sci. C 14, 283–287 (2013). https://doi.org/10.1631/jzus.C12MNT08
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DOI: https://doi.org/10.1631/jzus.C12MNT08