Abstract:
High control performance is essential in many precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This...Show MoreMetadata
Abstract:
High control performance is essential in many precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This paper investigates the impact of load flexibility on piezoelectrically actuated positioning systems in terms of control performance. The modeling method used combines modal analysis with simple transfer function manipulations, and shows, how the load dynamics may influence the control performance. The analysis is experimentally verified on a commercial AFM system.
Published in: 2009 European Control Conference (ECC)
Date of Conference: 23-26 August 2009
Date Added to IEEE Xplore: 02 April 2015
Print ISBN:978-3-9524173-9-3