A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss | IEEE Conference Publication | IEEE Xplore
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A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss

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Ph. Helin; A. Firrincieli; A. Ray Chaudhuri; N. Pham; S. Lenci; M. Mannarino
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Abstract:

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm wi...Show More

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Abstract:

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of layer thickness control; 1nm for a silicon nitride thickness of 400nm with low propagation loss 0.13dB/cm at 1520nm.
Published in: 2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)
Date of Conference: 07-11 July 2019
Date Added to IEEE Xplore: 29 August 2019
ISBN Information:
DOI: 10.23919/PS.2019.8818059
Conference Location: Fukuoka, Japan
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