Abstract:
Targeting to address one of the grandest challenges in HfO_{2} -based ferroelectric (FE) materials and devices, we invent a novel, effective, and versatile technique em...Show MoreMetadata
Abstract:
Targeting to address one of the grandest challenges in HfO_{2} -based ferroelectric (FE) materials and devices, we invent a novel, effective, and versatile technique employing replacement electrode solid phase epitaxy (SPE), achieving a significant reduction in the grain size of the HZO layer by \sim 30% and enhanced remnant polarization (P_{r}) by 42% simultaneously, as compared with the conventional ALD growth technique. P_{r} (\sim 25 \mu \mathrm{C} /cm^{2}) among the highest reported at sub- 450^{\circ}\mathrm{C} was realized. We also propose the underlying mechanism of the grain size-dependent ferroelectric properties, guided by thermodynamics-included first-principal simulation for nucleation process and kinetics effects-included analysis for phase change. It was discovered that grain size reduction plays a key role in decrease of the m-phase and the enhancement in grain boundary effects, leading to giant Pr improvement.
Date of Conference: 11-16 June 2023
Date Added to IEEE Xplore: 24 July 2023
ISBN Information: