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Aggressively Scaled Atomic Layer Deposited Amorphous InZnOx Thin Film Transistor Exhibiting Prominent Short Channel Characteristics (SS= 69 mV/dec.; DIBL = 27.8 mV/V) and High Gm(802 μS/μm at VDS = 2V) | IEEE Conference Publication | IEEE Xplore

Aggressively Scaled Atomic Layer Deposited Amorphous InZnOx Thin Film Transistor Exhibiting Prominent Short Channel Characteristics (SS= 69 mV/dec.; DIBL = 27.8 mV/V) and High Gm(802 μS/μm at VDS = 2V)


Abstract:

In this work, we reported aggressively scaled amorphous InZnOx (\alpha-IZO) thin film transistor (TFT) in channel length (Lch=8 nm) and thickness (2 nm) as a promising ...Show More

Abstract:

In this work, we reported aggressively scaled amorphous InZnOx (\alpha-IZO) thin film transistor (TFT) in channel length (Lch=8 nm) and thickness (2 nm) as a promising candidate for monolithic three-dimensional (M3D) integrations at back-end-of-line (BEOL). The bottom gate TFT with ultra-short Lch of 8 nm exhibited excellent sub-threshold swings (SS) value of 69 mV/dec, high filed-effect mobility (\mu_{F}E) of 41 cm^{2}/V-s and on-current density (ION) up to 575 \mu A\ \mu m (V_{DS} = 1V, V_{G}|= 2V) with outstanding maximum transconductance (Gm) value of 521 \mu S \mu m (V_{D}S = 1 V) . In particular, the maximum Gm reaches 802 \mu S \mu m at V_{DS}= 2V and very low drain induce barrier lowering (DIBL) performance of 27.8 mV/V represent the best Gm and DIBL values reported for ternary amorphous oxide-semiconductor based TFTs. Furthermore, the highly stable device characteristics of the TFT was demonstrated with positive gate bias stress (PBS), the threshold voltage shift \left(\Delta \mathrm{V}_{t h}\right) of 26.5 mV (Lch=50 nm) after 3000 s stress with VG-Vth of 3 V was observed
Date of Conference: 11-16 June 2023
Date Added to IEEE Xplore: 24 July 2023
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Conference Location: Kyoto, Japan

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