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Epitaxial Strain Control of HfxZr1-xO2 with Sub-nm IGZO Seed Layer Achieving EOT=0.44 nm for DRAM Cell Capacitor | IEEE Conference Publication | IEEE Xplore

Epitaxial Strain Control of HfxZr1-xO2 with Sub-nm IGZO Seed Layer Achieving EOT=0.44 nm for DRAM Cell Capacitor


Abstract:

We propose for the first time a method to crystallize 4.5 nm H\mathrm{f}_{05} Z \mathrm{r}_{05}\mathrm{O}_{2} (HZO) in the ferroelectric orthorhombic phase (0-phase) by...Show More

Abstract:

We propose for the first time a method to crystallize 4.5 nm H\mathrm{f}_{05} Z \mathrm{r}_{05}\mathrm{O}_{2} (HZO) in the ferroelectric orthorhombic phase (0-phase) by using a sub-nm InGaZnO (IGZO) seed layer. Atomic mismatch between IGZO and HZO layers introduces epitaxial strain, inducing ferroelectric phase crystallization even at thickness of 4.5 nm. HZO/IGZO achieved an EOT of 0.44 nm, coercive voltage of 0.51 V, and high endurance >1014. Hence, HZO/IGZO is a promising candidate for next generation high-k dielectric in DRAM capacitor applications.
Date of Conference: 11-16 June 2023
Date Added to IEEE Xplore: 24 July 2023
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Conference Location: Kyoto, Japan

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