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Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table

Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table

Yanling Tian, Zhiyong Guo, Fujun Wang, Junlan Li, Dawei Zhang
Copyright: © 2013 |Volume: 3 |Issue: 2 |Pages: 16
ISSN: 2156-1664|EISSN: 2156-1656|EISBN13: 9781466632684|DOI: 10.4018/ijimr.2013040103
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MLA

Tian, Yanling, et al. "Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table." IJIMR vol.3, no.2 2013: pp.39-54. http://doi.org/10.4018/ijimr.2013040103

APA

Tian, Y., Guo, Z., Wang, F., Li, J., & Zhang, D. (2013). Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table. International Journal of Intelligent Mechatronics and Robotics (IJIMR), 3(2), 39-54. http://doi.org/10.4018/ijimr.2013040103

Chicago

Tian, Yanling, et al. "Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table," International Journal of Intelligent Mechatronics and Robotics (IJIMR) 3, no.2: 39-54. http://doi.org/10.4018/ijimr.2013040103

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Abstract

This paper presents the mechanical design and experimental characterization of a 2-DOF serial flexure-based micropositioning table. The cascade mechanical structure is proposed to implement planar motions of the moving platform. In order to increase the stroke of the moving platform, a lever mechanism is designed to amplify the displacement of the piezoelectric actuator. The finite element method is utilized to analyze the mechanical and thermal characteristics of the proposed 2-DOF micropositioning table. The WEDM (Wire Electro-Discharge Machining) technique is used to manufacture the prototype of the micropositioning table. A number of experimental tests have been conducted to investigate the characteristics of the developed system.

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