Authors:
Chia-Lien Ma
;
Chih-Chung Yang
;
Yu-Hsuan Lin
and
Kuo-Cheng Huang
Affiliation:
Taiwan Instrument Research Institute, National Applied Research Laboratories, 20 R&D RD. VI, Hsinchu, Taiwan
Keyword(s):
Auto Focus, Optical Inspection, Assembly Error Detection.
Abstract:
The non-contact optical focus positioning technology proposed in this study uses the principle of optical imaging to develop a system that is simple, fast, and has a microscopic image inspection function. This study uses a dual optical path design for the upper and lower systems. The near-semi-reflective substrates in the system have different reflectivity coatings. The energy density of the transmitted and reflected light is captured through image processing. The position shift or tilt of the components is then used to calculate the energy density difference of the upper and lower systems. It can be quickly converted into focus position, system uniformity, surface height, component assembly offset and tilt. The technology of this research can overcome the problems of manual focus, additional device focus module and human eye misjudgement, and provide a measurement method and tool with simple operation and high accuracy. It can effectively adjust the Z-axis offset range of the lower
system can be effectively adjusted by ±1 mm, the lower system tilts range ±1 ̊, and the substrate tilts range ±1 by the difference of the upper and lower energy densities. The Y-axis offset range is ±0.1 mm by the maximum energy density of the upper system.
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