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Hardware Platforms for Electrostatic Tuning of Mems Gyroscope Using Nature-Inspired Computation

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Evolvable Hardware

Abstract

We propose a tuning method for Micro-Electro-Mechanical Systems (MEMS) gyroscopes based on evolutionary computation to increase the accuracy of MEMS gyroscopes through electrostatic tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. We also report on the development and preliminary results of a hardware platform for integrated tuning based on “switched drive-angle” of MEMS gyroscopes whereby the same gyro is operated with its drive direction first at 0° and then at 90°. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

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Keymeulen, D. et al. (2006). Hardware Platforms for Electrostatic Tuning of Mems Gyroscope Using Nature-Inspired Computation. In: Higuchi, T., Liu, Y., Yao, X. (eds) Evolvable Hardware. Genetic and Evolutionary Computation. Springer, Boston, MA . https://doi.org/10.1007/0-387-31238-2_12

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  • DOI: https://doi.org/10.1007/0-387-31238-2_12

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-387-24386-3

  • Online ISBN: 978-0-387-31238-5

  • eBook Packages: Computer ScienceComputer Science (R0)

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