Abstract
This paper presents some results on geometrical error compensation using multilayer neural networks (NNs). It is the objective to attain higher compensation performance with less or comparable memory, using this approach. There are three main contributions. First, multilayer NNs are used to approximate the components of geometrical errors. This results in a significantly less number of neurons compared to the use of radial basis functions (RBFs). Secondly, the direction of motion is considered in the compensator. This is important as the geometrical errors can be quite distinct depending on the direction of motion due to backlash and other nonlinearities in the servo systems. Thirdly, the Abbe error is explicitly addressed in the compensator.
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© 2005 Springer-Verlag Berlin Heidelberg
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Tan, K.K., Huang, S., Prahlad, V., Lee, T.H. (2005). Geometrical Error Compensation of Gantry Stage Using Neural Networks. In: Wang, J., Liao, XF., Yi, Z. (eds) Advances in Neural Networks – ISNN 2005. ISNN 2005. Lecture Notes in Computer Science, vol 3498. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11427469_142
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DOI: https://doi.org/10.1007/11427469_142
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-25914-5
Online ISBN: 978-3-540-32069-2
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