Abstract
Flow time of semiconductor manufacturing factory is highly related to the shop floor status; however, the processes are highly complicated and involve more than hundred of production steps. Therefore, a simulation model with the production process of a real wafer fab located in Hsin-Chu Science-based Park of Taiwan is built. In this research, a hybrid approach by combining Self-Organizing Map (SOM) and Case-Based Reasoning (CBR) for flow time prediction in semiconductor manufacturing factory is proposed. And Genetic Algorithm (GA) is applied to fine-tune the weights of features in the CBR model. The flow time and related shop floor status are collected and fed into the SOM for classification. Then, corresponding GA-CBR is selected and applied for flow time prediction. Finally, using the simulated data, the effectiveness of the proposed method (SGA-CBR) is shown by comparing with other approaches.
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Chang, PC., Wang, YW., Liu, CH. (2006). Combining SOM and GA-CBR for Flow Time Prediction in Semiconductor Manufacturing Factory. In: Greco, S., et al. Rough Sets and Current Trends in Computing. RSCTC 2006. Lecture Notes in Computer Science(), vol 4259. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11908029_79
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DOI: https://doi.org/10.1007/11908029_79
Publisher Name: Springer, Berlin, Heidelberg
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