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A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization

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High Performance Computing (ISHPC 2000)

Part of the book series: Lecture Notes in Computer Science ((LNCS,volume 1940))

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Abstract

We propose a new design concept for controlling the deflection of a micro-membrane with the aid of its thickness distribution for realizing a prescribed design in the MEMS. As an example, we treat a micro air pump that comprises a micro-membrane. The membrane is actuated by an electrostatic force. The membrane deflects and thus the deflection is influenced by the air pressure and the electrostatic field. This is a highly complicated system. To find out a proper thickness distribution, we use the genetic algorithm that is appropriate to reduce the searching space of solution.

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References

  1. Hiroshi Toshiyoshi, Journal of Microelectromechanical systems, 5, 4, p231, (1996)

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  2. Xing Yang, Micro Electro Mechanical Systems January, p114, (1997)

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  3. Michael Koch et. al., Sensors and Actuators, 70A, p98, (1998)

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  4. H. Kotera, Y. Sakamoto, T. Hirasawa, S. Shima and Robert W. Dutton, MICRO SYSTEM technologies, p91, (1998)

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  5. David E. Goldberg, Genetic Algorithms in Search Optimization and Machine Learning. Addison Wesley. (1989)

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Kyoto University, Sakyou-ku, Kyoto, Japan

    Hidetoshi Kotera, Taku Hirasawa, Sasatoshi Senga & Susumu Shima

Authors
  1. Hidetoshi Kotera
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  2. Taku Hirasawa
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  3. Sasatoshi Senga
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  4. Susumu Shima
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Editor information

Editors and Affiliations

  1. Departamento de Arquitectura de Computadores, Universidad Politecnica de Catalunya, Spain

    Mateo Valero

  2. Department of Information and Computer Sciences, Nara Women’s University, Japan

    Kazuki Joe

  3. Institute of Industrial Science Center for Conceptual Information Processing Research, University of Tokyo, Japan

    Masaru Kitsuregawa

  4. Graduate School of Engineering Electrical Engineering Department, University of Tokyo, Japan

    Hidehiko Tanaka

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© 2000 Springer-Verlag Berlin Heidelberg

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Kotera, H., Hirasawa, T., Senga, S., Shima, S. (2000). A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization. In: Valero, M., Joe, K., Kitsuregawa, M., Tanaka, H. (eds) High Performance Computing. ISHPC 2000. Lecture Notes in Computer Science, vol 1940. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-39999-2_55

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  • DOI: https://doi.org/10.1007/3-540-39999-2_55

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-41128-4

  • Online ISBN: 978-3-540-39999-5

  • eBook Packages: Springer Book Archive

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