Semi-interactive Structure and Fault Analysis of (111)7×7 Silicon Micrographs

Abstract

A new technique by which the electron micrographs of (111)7×7 Silicon are analyzed is discussed. In contrast to the conventional manner by which pseudocolor is introduced into normally gray scale surface scans, this method performs a high-level, knowledge based analysis to provide the viewer with additional information about the silicon sample at hand. Namely, blob recognition and analysis, as well as a priori knowledge of (111)7×7 Silicon can be utilized to delineate structural patterns and detect fault locations. The conveyance of information such as this is of much more consequence to an investigator interested in determining a sample’s uniformity and structure.