Abstract
A piezoelectric pump of small size, compact structure, light weight and large flow rate has been developed in this paper. The pump consists of two circular piezoelectric vibrators, two valve covers and three check valves. Furthermore, two circular piezoelectric vibrators made by MEMS technology are proposed as the dual transducer of the pump body. The simulation analysis consequences show that beryllium bronze is optimal metal material as substrate of piezoelectric vibrator, compared with other metal materials including alloy steel, titanium alloy and aluminum alloy. A prototype of the piezoelectric pump, with the external dimensions of 40 mm × 40 mm × –20 mm, was made by 3D printing technology that can replace conventional techniques and greatly shorten the processing cycle. The experimental results show that water rised 5 mm through the inlet pipe, when double piezoelectric vibrators were driven by AC voltages.
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Acknowledgments
This work was supported by Jiangxi Science and Technology Support Project (20151BBE50044).
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Huang, L. et al. (2019). Study on Double Piezoelectric Layers Driven Pump Based on MEMS and 3D Printing. In: Tang, Y., Zu, Q., Rodríguez García, J. (eds) Human Centered Computing. HCC 2018. Lecture Notes in Computer Science(), vol 11354. Springer, Cham. https://doi.org/10.1007/978-3-030-15127-0_57
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DOI: https://doi.org/10.1007/978-3-030-15127-0_57
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