Abstract
Piezoelectric actuators are widely employed in the field of micro-/nanomanipulation. However, hysteresis is the dominant issue in piezoelectric actuators, which leads to a great challenge to achieve high precision micromanipulation. Proportional-integral-derivative (PID) control is an efficient approach to reduce hysteresis effect in piezoelectric actuators. However, its parameter tuning is a time-consuming work for PID motion tracking control implementation. In this work, the neural networks (NN) is adopted to provide a functional model for PID with optimized parameters. It enables an intelligent and adaptive motion tracking process. The effectiveness of the presented NN-based PID control scheme is verified by performing simulation studies.
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References
Croft, D., Shedd, G., Devasia, S.: Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. In: Proceedings of 2000 American Control Conference (ACC), vol. 3, pp. 2123–2128 (2000)
Nan, Z., Xu, Q.: Depth detection for a stereo cell micro-injection system with dual cameras. In: Proceedings of 2017 IEEE International Conference on Robotics and Biomimetics (ROBIO), pp. 1106–1111 (2017)
Zhang, X., Xu, Q.: Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage. Int. J. Precis. Eng. Manuf. 19(1), 109–118 (2018)
Xu, Q.: Micromachines for Biological Micromanipulation. Springer, Cham (2018). https://doi.org/10.1007/978-3-319-74621-0
Wang, G., Xu, Q.: LuGre model based hysteresis compensation of a piezo-actuated mechanism. In: Chen, W., Hosoda, K., Menegatti, E., Shimizu, M., Wang, H. (eds.) IAS 2016. AISC, vol. 531, pp. 645–657. Springer, Cham (2017). https://doi.org/10.1007/978-3-319-48036-7_47
Lin, C.J., Chen, S.Y.: Evolutionary algorithm based feedforward control for contouring of a biaxial piezo-actuated stage. Mechatronics 19(6), 829–839 (2009)
Zhang, Y., Xu, Q.: Adaptive sliding mode control with parameter estimation and kalman filter for precision motion control of a piezo-driven microgripper. IEEE Trans. Control Syst. Technol. 25(2), 728–735 (2017)
Ali, A., Ahmed, S.F., Joyo, M.K., Kushsairy, K.: MPC-PID comparison for controlling therapeutic upper limb rehabilitation robot under perturbed conditions. In: Proceedings of IEEE International Conference on Engineering Technologies and Social Sciences (ICETSS), pp. 1–5 (2017)
Zhuang, M., Atherton, D.: Automatic tuning of optimum PID controllers. In: IEE Proceedings D-Control Theory and Applications, vol. 140, pp. 216–224 (1993)
Youssef, A.: Optimized PID tracking controller for piezoelectric hysteretic actuator model. World J. Model. Simul. 9(3), 223–234 (2013)
Xu, Q., Tan, K.K.: Advanced Control of Piezoelectric Micro-/Nano-positioning Systems. AIC. Springer, Cham (2016). https://doi.org/10.1007/978-3-319-21623-2
Acknowledgement
This work was supported in part by the National Natural Science Foundation of China under Grant 51575545, the Macao Science and Technology Development Fund under Grant 179/2017/A3, and Research Committee of the University of Macau under Grant MYRG2018-00034-FST.
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Yan, Y., Xu, Q. (2019). Neural Networks-Based PID Precision Motion Control of a Piezo-Actuated Microinjector. In: Yu, H., Liu, J., Liu, L., Ju, Z., Liu, Y., Zhou, D. (eds) Intelligent Robotics and Applications. ICIRA 2019. Lecture Notes in Computer Science(), vol 11745. Springer, Cham. https://doi.org/10.1007/978-3-030-27529-7_35
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DOI: https://doi.org/10.1007/978-3-030-27529-7_35
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