Abstract
A 2-dimensional acoustic sensor with programmable directivity is proposed. The sensor is formed by the combination of two orthogonal detectors of acoustic particle velocity. Differently from previous versions, the proposed device is fabricated using a commercially available post-CMOS technology, opening the way to low cost applications. Characterization of the frequency response and directivity is presented. The possibility of producing a sensor with electronically programmable directivity is demonstrated.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Ramamohan KN, Comesaña DF, Leus G (2018) Uniaxial acoustic vector sensors for direction-of-arrival estimation. J Sound Vib 437:276–291
Song Y, Li YL, Wong KT (2015) Acoustic direction finding using a pressure sensor and a uniaxial particle velocity sensor. IEEE Trans Aerosp Electron Syst 51(4):2560–2569
Song Y, Wong KT, Li Y (2015) Direction finding using a biaxial particle-velocity sensor. J Sound Vib 340:354–367
Garcia-Bonito J, Elliott SJ (1999) Active cancellation of acoustic pressure and particle velocity in the near field of a source. J Sound Vib 221(1):85–116
Felisberto P, Santos P, Jesus SM (2018) Acoustic pressure and particle velocity for spatial filtering of bottom arrivals. IEEE J Oceanic Eng 99:1–14
De Bree HE, Leussink P, Korthorst T, Jansen H, Lammerink TS, Elwenspoek M (1996) The μ-flown: a novel device for measuring acoustic flows. Sens Actuators A 54(1–3):552–557
Pjetri O, Wiegerink RJ, Lammerink TS, Krijnen GJ (2013) A crossed-wire 2-dimensional acoustic particle velocity sensor. In: Sensors. IEEE, pp 1–4
Pjetri O, Wiegerink RJ, Krijnen GJ (2016) A 2D particle velocity sensor with minimal flow disturbance. IEEE Sens J 16(24):8706–8714
Yntema DR, Van Honschoten JW, Wiegerink RJ, Elwenspoek M (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. J Micromech Microeng 18:115004
Bruschi P, Butti F, Piotto M (2011) CMOS compatible acoustic particle velocity sensors. In: IEEE Sensors 2011 conference proceedings, Limerick, 28–31 Oct 2011, pp 1405–1408
Piotto M, Butti F, Zanetti E, Di Pancrazio A, Iannaccone G, Bruschi P (2015) Characterization and modeling of CMOS-compatible acoustical particle velocity sensors for applications requiring low supply voltages. Sens Actuators A 229:192–202
Piotto M, Butti F, Bruschi P (2014) Acoustic velocity sensors with programmable directivity. In: Sensors, Springer, New York, pp 271–275
CMP website. URL: https://mycmp.fr/datasheet/mems-bulk-micromachining-frontside-bulk-micromachining
Piotto M, Ria A, Stanzial D, Bruschi P (2019) Design and characterization of acoustic particle velocity sensors fabricated with a commercial post-CMOS MEMS process. In: The 20th International conference on solid-state sensors, actuators and microsystems (Transducer 2019), Berlin, 23–27 June 2019, pp 1839–1842
Acknowledgements
This research has been supported by DELTATECH Italy and the Italian municipality of Sogliano al Rubicone (Italy) in the framework of the SIHT (Sogliano Industrial High Technology) project.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this paper
Cite this paper
Ria, A., Piotto, M., Cicalini, M., Nannini, A., Bruschi, P. (2020). 2-D Acoustic Particle Velocity Sensors Based on a Commercial Post-CMOS MEMS Technology. In: Saponara, S., De Gloria, A. (eds) Applications in Electronics Pervading Industry, Environment and Society. ApplePies 2019. Lecture Notes in Electrical Engineering, vol 627. Springer, Cham. https://doi.org/10.1007/978-3-030-37277-4_26
Download citation
DOI: https://doi.org/10.1007/978-3-030-37277-4_26
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-37276-7
Online ISBN: 978-3-030-37277-4
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)