Abstract
With the continuous improvement of the accuracy and performance of Micro Electro-Mechanical System (MEMS), and the continuous innovation and improvement of inertial and integrated navigation algorithms, the performance of systems based on MEMS have been gradually improved, and they have become more and more widely used [1, 2]. The main contents of this article are from the engineering term, focusing on the highly integrated, complex and miniaturized design method of a certain type of MEMS component for movement-control system like autonomous vehicle or airplane in the field of military and civilian; this component can provide digital three-axis angular rate, acceleration and attitude information of more than 6 axis. The digital signal processing was optimized taking timing sequence into account, the digital filter was designed in terms of s and z domains, the bandwidth was configured, the dynamic character test of the MEMS component was carried out practically, and the corresponding transfer function model was established. The results proved that the component meets the requirements of high precision and high dynamic character for movement-control system with more axis information.
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Duan, C., Hu, Y., Tao, T. (2021). Integrated Digital MEMS Design for Movement-Control System. In: Krob, D., Li, L., Yao, J., Zhang, H., Zhang, X. (eds) Complex Systems Design & Management . Springer, Cham. https://doi.org/10.1007/978-3-030-73539-5_20
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DOI: https://doi.org/10.1007/978-3-030-73539-5_20
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