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Micro-nano Scale Longitudinal Displacement Measurement of Microspheres Based on Digital Holography

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Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 13014))

Abstract

Most of the existing measurements of microspheres are based on transmission, which use the light field through the microspheres and the substrate to form interference fringes, and then analyzes the movement and variation of the microspheres. Therefore, only transparent samples and transparent substrates can be measured, which greatly limits the measurement range and the application scenarios. In this paper, we present a near-field diffraction measurement for reflective microspheres. This method has no restrictions on the material of the microspheres themselves, and the substrate is no longer required to be the same material as the microspheres. Therefore, the range of measurement using microspheres will be greatly increased. In the case of microspheres with different materials and substrates, microspheres can not only be applied to simple cell measurement, but also are expected to be combined with other measurement methods in the future to further improve the measurement accuracy and measurement range of the existing measurement methods.

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Funding

Supported by the National Natural Science Foundation of China (Grants 61925307, 61927805 and U1813210), Youth Program of National Natural Science Foundation of China (Grants 61903359) and the Instrument Developing Project of the Chinese Academy of Sciences (Grant No. YJKYYQ20180027).

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Correspondence to Lianqing Liu .

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Tang, S., Shi, J., Shi, H., Yu, P., Su, C., Liu, L. (2021). Micro-nano Scale Longitudinal Displacement Measurement of Microspheres Based on Digital Holography. In: Liu, XJ., Nie, Z., Yu, J., Xie, F., Song, R. (eds) Intelligent Robotics and Applications. ICIRA 2021. Lecture Notes in Computer Science(), vol 13014. Springer, Cham. https://doi.org/10.1007/978-3-030-89098-8_27

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  • DOI: https://doi.org/10.1007/978-3-030-89098-8_27

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-89097-1

  • Online ISBN: 978-3-030-89098-8

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