Abstract
Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) has been proposed as an alternative material to toxic lead zirconate titanate (commonly referred as PZT) for the production of micro-electro-mechanical devices based on piezoelectric thin films. Among the possible fabrication methods, sol-gel is the most adoptable and cost-effective technology. To produce good quality films, the homogeneity of the solution is a key factor. For this purpose, 2-methoxyethanol (a toxic, carcinogen solvent) is widely used, although such approach affects the environmental sustainability of the fabrication process. This work deals with the development of a “green” high stable precursor solution based on non-toxic and non-carcinogenic solvents. Results showed that a highly stable, homogeneous solution has been produced thanks to a thorough reagents dehydration. By depositing such solution on commercial platinum-coated wafers, thin layers with homogeneous morphology and improved electrical stability have been produced.
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Casuscelli, V., Barbato, P.S., Scaldaferri, R., Aprea, P., Caputo, D. (2023). Green, Homogeneous Solution for BZT-BCT Thin Film Deposition. In: Di Francia, G., Di Natale, C. (eds) Sensors and Microsystems. AISEM 2021. Lecture Notes in Electrical Engineering, vol 918. Springer, Cham. https://doi.org/10.1007/978-3-031-08136-1_34
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DOI: https://doi.org/10.1007/978-3-031-08136-1_34
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