Abstract
In this paper, aluminum nitride based Z-axis vibration sensor with optimized structure is reported. The main objective of this work is to miniaturize of the device with special specification. The optimization of the accelerometer structure is done using finite element analysis (FEA) in COMSOL in order to get maximum sensitivity. The sensors with different geometries, namely circular annular structure and trampoline structure, are designed and simulated. Specifically, the sensor consists of a proof mass suspended with the continuous diaphragm in circular annular structure and four guided beams in the trampoline structure. Continuous diaphragm and guided beams behave as springs. The miniaturization of the device is done by choosing the proper value of size of proof mass and springs. Sensitivity mainly depends on the proof mass weight M and spring constant k. In this study to get maximum sensitivity the size of proof mass and springs is selected at which the sensitivity is maximum. Aluminum nitride piezoelectric layer with piezoelectric coefficient \(d_{33}=12\) pC/N is used to sense the displacement of the proof mass. The first eigen mode of the structures are found at 14.54 kHz and 13.50 kHz respectively for circular annular structure and trampoline structure. The sensitivity of the structure without the amplifier is found 3.22 mV/g in circular annular structure and 4.39 mV/g in trampoline structure at 100 Hz.
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References
Liu, C.: Foundations of MEMS. Pearson Education India (2012)
Yaghootkar, B., Azimi, S., Bahreyni, B.: A high-performance piezoelectric vibration sensor. IEEE Sens. J. 17(13), 4005–4012 (2017). https://doi.org/10.1109/JSEN.2017.2707063
Chen, Z.H., et al.: The design of aluminum nitride-based lead-free piezoelectric MEMS accelerometer system. IEEE Trans. Electr. Devices 67(10), 4399–4404 (2020). https://doi.org/10.1109/TED.2020.3019230
Zhang, L., Lu, J., Kuwashiro, S., Mitsue, M., Maeda, R.: Fabrication and evaluation of aluminum nitride based MEMS piezoelectric vibration sensors for large-amplitude vibration applications. Microsyst. Technol. 27(1), 235–242 (2020). https://doi.org/10.1007/s00542-020-04941-3
Chauhan, S.S., Joglekar, M.M., Manhas, S.K.: High power density CMOS compatible micro-machined MEMs energy harvester. IEEE Sens. J. 19(20), 9122–9130 (2019). https://doi.org/10.1109/JSEN.2019.2923972
Stephen, B., Graham, E., Michael, K., Neil, W.: MEMS Mechanical Sensors - Stephen Beeby
Wang, L.-P., Deng, K., Zou, L., Wolf, R., Davis, R.J., Trolier-Mckinstry, S.: Microelectromechanical Systems (MEMS) Accelerometers Using Lead Zirconate Titanate Thick Films (2002)
Trivedi, S., et al.: Piezoelectric MEMS vibration sensor module for machining quality prediction. In: 2020 IEEE Sensors. IEEE (2020)
Hindrichsen, C.C., et al.: Circular piezoelectric accelerometer for high band width application. In: SENSORS 2009 IEEE. IEEE (2009)
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Gupta, R.K., Manhas, S.K. (2022). Design, Simulation and Optimization of Aluminum Nitride Based Accelerometer. In: Shah, A.P., Dasgupta, S., Darji, A., Tudu, J. (eds) VLSI Design and Test. VDAT 2022. Communications in Computer and Information Science, vol 1687. Springer, Cham. https://doi.org/10.1007/978-3-031-21514-8_4
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DOI: https://doi.org/10.1007/978-3-031-21514-8_4
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