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Sensitivity Analysis of MEMS Based Piezoresistive Sensor Using COMSOL Multiphysics

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Proceedings of the 3rd International Conference on Frontiers of Intelligent Computing: Theory and Applications (FICTA) 2014

Part of the book series: Advances in Intelligent Systems and Computing ((AISC,volume 327))

Abstract

The present paper peruses MEMS based piezoresistive pressure sensor and its fabrication techniques. Simulation of the pressure sensor is done by using COMSOL Multiphysics software for P-type silicon piezoresistor. The deflection of N-type silicon diaphragm depends upon the Young’s modulus of the material and varies with the amount of force applied to the diaphragm. The simulation result emphasizes that an appropriate selection of the piezoresistive material and the amount of force applied on the diaphragm impacts the sensor sensitivity levels upon low power consumption.

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Authors and Affiliations

  1. Electrical Engineering Department, School of Engineering, Gautam Buddha University, Greater Noida, 201312, U.P., India

    Ankit Mishra, Ishita Bahal, Jagrati Arya, Abhishek Pandey & Shabana Urooj

Authors
  1. Ankit Mishra
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  2. Ishita Bahal
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  3. Jagrati Arya
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  4. Abhishek Pandey
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  5. Shabana Urooj
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Editor information

Editors and Affiliations

  1. Department of Computer Science and Engineering, Anil Neerukonda Institute of Technology and Sciences, Vishakapatnam, Andhra Pradesh, India

    Suresh Chandra Satapathy

  2. Bhubaneswar Engineering College, Bhubaneswar, Odisha, India

    Bhabendra Narayan Biswal

  3. University of Hyderabad, Hyderabad, Andhra Pradesh, India

    Siba K. Udgata

  4. Department of Computer Science and Engineering, University of Kalyanai, Faculty of Engg., Tech. & Management, Kalyanai, West Bengal, India

    J.K. Mandal

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© 2015 Springer International Publishing Switzerland

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Mishra, A., Bahal, I., Arya, J., Pandey, A., Urooj, S. (2015). Sensitivity Analysis of MEMS Based Piezoresistive Sensor Using COMSOL Multiphysics. In: Satapathy, S., Biswal, B., Udgata, S., Mandal, J. (eds) Proceedings of the 3rd International Conference on Frontiers of Intelligent Computing: Theory and Applications (FICTA) 2014. Advances in Intelligent Systems and Computing, vol 327. Springer, Cham. https://doi.org/10.1007/978-3-319-11933-5_8

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  • DOI: https://doi.org/10.1007/978-3-319-11933-5_8

  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-11932-8

  • Online ISBN: 978-3-319-11933-5

  • eBook Packages: EngineeringEngineering (R0)

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