Abstract
To provide high velocity and performance, a dynamic model based on 4-DOF wafer handling robot in semiconductor industry is setup in the paper, formulas are derived, and also stability proof is given. In the final part of paper the experiment result of decoupling control is given, and it verified the correction of dynamic formulas.
This work is supported by National Natural Science Foundation of China (Grant Nos. 51205134, 91223201), Science and Technology Program of Guangzhou (Grant No. 2014Y2-00217), Research Project of State Key Laboratory of Mechanical System and Vibration (MSV201405), the Fundamental Research Funds for the Central University (Fund No. 2015ZZ007) and Natural Science Foundation of Guangdong Province (S2013030013355).
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
Reference
Armstrong, B., Khatib, O., Burdick, J.: The explicit dynamic model and inertial parameters of the PUMA 560 arm. In: IEEE International Conference on Robotics and Automation. IEEE (1986)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2015 Springer International Publishing Switzerland
About this paper
Cite this paper
Yang, L., Wang, N. (2015). Decoupling Control Based on Dynamic Model of 4-DOF Wafer Handling Robot. In: Liu, H., Kubota, N., Zhu, X., Dillmann, R. (eds) Intelligent Robotics and Applications. Lecture Notes in Computer Science(), vol 9246. Springer, Cham. https://doi.org/10.1007/978-3-319-22873-0_50
Download citation
DOI: https://doi.org/10.1007/978-3-319-22873-0_50
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-22872-3
Online ISBN: 978-3-319-22873-0
eBook Packages: Computer ScienceComputer Science (R0)