Abstract
In this paper, a levitating nano-positioning stage with arc-edged permanent magnet Halbach arrays is presented. Construction of the nano-positioning stage is given, and the components of the stage are designed. For the key actuation unit, an accurate model of the arc-edged permanent magnet Halbach actuator is developed using the Fourier series expansion, which is validated by the Maxwell software. Based on the model, optimization is made to the arc-edged permanent magnet Halbach array. The optimization results show that the arc-edged permanent magnet Halbach actuator can produce a very small thrust ripple with a large average thrust to guarantee the high precision of the positioning stage.
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© 2015 Springer International Publishing Switzerland
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Chen, Jw., Ma, Lt., Zhang, B., Ding, H. (2015). Design of a Levitating Nano-Positioning Stage with Arc-Edged Permanent Magnet Halbach Arrays. In: Liu, H., Kubota, N., Zhu, X., Dillmann, R., Zhou, D. (eds) Intelligent Robotics and Applications. ICIRA 2015. Lecture Notes in Computer Science(), vol 9245. Springer, Cham. https://doi.org/10.1007/978-3-319-22876-1_50
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DOI: https://doi.org/10.1007/978-3-319-22876-1_50
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