Abstract
A simple and easy fabrication method of micro-fluidic devices using only single lithography processes was proposed. Thick resist patterns printed using a simple and handmade contact-lithography tool were directly used as flow-path patterns. Because pattern widths were as large as 50–200 μm, low-cost film reticles were applicable. Accordingly, various flow-path shapes were designed arbitrarily using a versatile computer aided design tool, and easily obtained in very quick turn-around times at very low costs. The sidewalls of flow paths were controlled almost vertical using long-wavelength exposure light. The flow paths formed on a silicon wafer chip were easily capped by sandwiching them between a vessel and lid plates using bolts and nuts. Even when two colored waters were simultaneously injected from the two inlet ports of a swirl-type micro-mixer, they did not leak at all in spite of such simple assemblies. The new fabrication method of micro-fluidic devices using thick resist patterning will be useful for various applications.
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This work was partially supported by Research Institute for Science and Technology of Tokyo Denki University, Grant Number Q13T-02.
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Horiuchi, T., Yoshino, S., Miyanishi, J. (2015). Simple Fabrication Method of Micro-Fluidic Devices with Thick Resist Flow Paths Designed Arbitrarily Using Versatile Computer Aided Design Tools. In: Plantier, G., Schultz, T., Fred, A., Gamboa, H. (eds) Biomedical Engineering Systems and Technologies. BIOSTEC 2014. Communications in Computer and Information Science, vol 511. Springer, Cham. https://doi.org/10.1007/978-3-319-26129-4_2
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