Skip to main content
SpringerLink
Log in

Free Open Source Mesh Healing for TCAD Device Simulations

  • Conference paper
  • First Online:
Large-Scale Scientific Computing (LSSC 2015)

Part of the book series: Lecture Notes in Computer Science ((LNISA,volume 9374))

Included in the following conference series:

Abstract

Device geometries in technology computer-aided design processes are often generated using parametric solid modeling computer-aided design tools. However, geometries generated with these tools often lack geometric properties, like being intersection-free, which are required for volumetric mesh generation as well as discretization methods. Contributing to this problem is the fact, that device geometries often have multiple regions, used for, e.g., assigning different material parameters. Therefore, a healing process of the geometry is required, which detects the errors and repairs them. In this paper, we identify errors in multi-region device geometries created using computer-aided design tools. A robust algorithm pipeline for healing these errors is presented, which has been implemented in ViennaMesh. This algorithm pipeline is applied on complex device geometries. We show, that our approach robustly heals device geometries created with computer-aided design tools and is even able to handle certain modeling inaccuracies.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. AutoCAD: http://www.autodesk.de/products/autocad/overview/

  2. FreeCAD: http://www.freecadweb.org/

  3. Synopsys Sentaurus Structure Editor: http://www.synopsys.com/Tools/TCAD/Pages/StructureEditor.aspx

  4. DEVSIM: https://github.com/devsim/devsim/

  5. Strikwerda, J.C.: Finite difference schemes and partial differential equations, 2nd edn. SIAM, Philadelphia (2004) ISBN: 978-0-89871-567-5

    Google Scholar 

  6. Cheng, S.W., Dey, T.K., Shewchuk, J.R.: Delaunay Mesh Generation. CRC Press, Boca Raton (2013) ISBN: 978-1584887300

    Google Scholar 

  7. Pratt, M.J.: Introduction to ISO 10303 - the STEP standard for product data exchange. J. Comput. Inf. Sci. Eng. 1(1), 102–103 (2001). doi:10.1115/1.1354995

    Article  Google Scholar 

  8. Si, H.: TetGen a quality tetrahedral mesh generator and three-dimensional delaunay triangulator, Version 1.4, User Manual (2006). http://wias-berlin.de/software/tetgen/files/tetgen-manual.pdf

  9. Szilvási-Nagy, M., Mátyási, G.: Analysis of STL files. J. Math. Comput. Model. 38(7–9), 945–960 (2003). doi:10.1016/S0895-7177(03)90079-3

    Article  MATH  Google Scholar 

  10. ViennaMesh: http://viennamesh.sourceforge.net/

  11. Attene, M., Campen, M., Kobbelt, L.: Polygon mesh repairing: an application perspective. ACM Comput. Surv. 45(2), 1–33 (2013). doi:10.1145/2431211.2431214

    Article  Google Scholar 

  12. Chong, C., Kumar, A.S., Lee, H.: Automatic mesh-healing technique for model repair and finite element model generation. J. Finite Elem. Anal. Des. 43(15), 1109–1119 (2007). doi:10.1016/j.finel.2007.06.009

    Article  Google Scholar 

  13. Frederick, C., Wong, Y., Edge, F.: Two-dimensional automatic mesh generation for structural analysis. Int. J. Numer. Meth. Eng. 2, 133–144 (1970). doi:10.1002/nme.1620020112

    Article  Google Scholar 

  14. Hoppe, H.: Progressive meshes. In: Proceedings of the 23rd Annual Conference on Computer Graphics and Interactive Techniques, pp. 99–108. New York (1996). doi:10.1145/237170.237216

  15. Ju, T.: Robust repair of polygonal models. ACM Trans. Graph. 23(3), 888–895 (2004). doi:10.1145/1015706.1015815

    Article  Google Scholar 

  16. Mesh Repairing Software on the Web: http://meshrepair.org/

  17. Polymender: http://www1.cse.wustl.edu/taoju/code/polymender.htm

  18. Burger, W., Burge, M.J.: Digital Image Processing - An Algorithmic Introduction Using Java. Texts in Computer Science, 1st edn. Springer-Verlag, London (2008)

    Google Scholar 

  19. Wu, Z., Sullivan, J.M.: Multiple material marching cubes algorithm. Int. J. Numer. Meth. Eng. 58(2), 189–207 (2003). doi:10.1002/nme.775

    Article  MATH  Google Scholar 

  20. Agrawal, N., Kimura, Y., Arghavani, R., Datta, S.: Impact of transistor architecture (bulk planar, trigate on bulk, ultrathin-body planar SOI) and material (silicon or III-V semiconductor) on variation for logic and SRAM applications. IEEE Trans. electron devices 60(10), 3298–3304 (2013). doi:10.1109/TED.2013.2277872

    Article  Google Scholar 

  21. Modzelewski, K., Chintala, R., Moolamalla, H., Parke, S., Hackler, D.: Design of a 32nm independently-double-gated FlexFET SOI transistor. In: Proceedings of the 17th Biennial University/Government/Industry Micro/Nano Symposium, pp. 64–67 (2008) doi:10.1109/UGIM.2008.24

Download references

Acknowledgements

This work has been supported by the European Research Council (ERC), grant #247056 MOSILSPIN and by the Austrian Science Fund FWF, grant P23598.

Author information

Authors and Affiliations

  1. Institute for Microelectronics, TU Wien, Vienna, Austria

    Florian Rudolf, Josef Weinbub, Karl Rupp, Peter Resutik & Siegfried Selberherr

  2. Institute for Analysis and Scientific Computing, TU Wien, Vienna, Austria

    Karl Rupp

  3. Christian Doppler Laboratory for Reliability Issues in Microelectronics, Institute for Microelectronics, TU Wien, Vienna, Austria

    Andreas Morhammer

Authors
  1. Florian Rudolf
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Josef Weinbub
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Karl Rupp
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Peter Resutik
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Andreas Morhammer
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Siegfried Selberherr
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Florian Rudolf .

Editor information

Editors and Affiliations

  1. Bulgarian Academy of Sciences, Sofia, Bulgaria

    Ivan Lirkov

  2. Inst. of Inform. & Communication, Bulgarian Academy of Sciences, Sofia, Bulgaria

    Svetozar D. Margenov

  3. Informatics and Mathematical Modell, Technical University of Denmark, Kongens Lyngby, Denmark

    Jerzy Waśniewski

Rights and permissions

Reprints and permissions

Copyright information

© 2015 Springer International Publishing Switzerland

About this paper

Cite this paper

Rudolf, F., Weinbub, J., Rupp, K., Resutik, P., Morhammer, A., Selberherr, S. (2015). Free Open Source Mesh Healing for TCAD Device Simulations. In: Lirkov, I., Margenov, S., Waśniewski, J. (eds) Large-Scale Scientific Computing. LSSC 2015. Lecture Notes in Computer Science(), vol 9374. Springer, Cham. https://doi.org/10.1007/978-3-319-26520-9_32

Download citation

  • DOI: https://doi.org/10.1007/978-3-319-26520-9_32

  • Published:

  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-26519-3

  • Online ISBN: 978-3-319-26520-9

  • eBook Packages: Computer ScienceComputer Science (R0)

Publish with us

Policies and ethics

Search

Navigation