Abstract
The manufacturer need for high-speed interconnection in three-dimensional integrated circuits (3D ICs) warrants inspection with through-silicon via (TSV) technology. Because the use of a flat component in tomographic reconstruction restricts the range of viewing angles, the computed tomography (CT) system produces limited-view projection images, which causes missing angle artifacts in the reconstructed 3D data. In this paper, we propose a total variation (TV) approach for tomographic image reconstruction. The proposed approach improves the image quality when the sinogram images have equal quality at all viewing angles and the accessible tilt range is restricted only by the physical limits of the oblique-view CT system. This method employs a bowtie TV (b-TV) penalty, which establishes a desirable balance between smooth and piecewise-constant solutions in the missing wedge region. Finally, the images resulting from the proposed method are shown to be smooth with sharp edges and fewer visible artifacts. Furthermore, the overall image quality is higher than those of images obtained by existing TV methods.
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Acknowledgement
We would like to acknowledge the financial support of the R&D Convergence Program of the Ministry of Science, ICT and Future Planning (MSIP) and the National Research Council of Science and Technology (NST) of the Republic of Korea (Grant B551179-12-04-00).
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Jin, KC., Yoon, JS., Song, YH. (2016). Reduction of Missing Wedge Artifact in Oblique-View Computed Tomography. In: Bebis, G., et al. Advances in Visual Computing. ISVC 2016. Lecture Notes in Computer Science(), vol 10073. Springer, Cham. https://doi.org/10.1007/978-3-319-50832-0_46
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DOI: https://doi.org/10.1007/978-3-319-50832-0_46
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