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Integrated Thermal Flow Sensors with Programmable Power-Sensitivity Trade-Off

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Sensors (CNS 2016)

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 431))

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Abstract

A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface.

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Author information

Authors and Affiliations

  1. IEIIT—Pisa, CNR, Via G. Caruso 16, 56122, Pisa, Italy

    Massimo Piotto

  2. Dipartimento di Ingegneria dell’Informazione, Università di Pisa, Via G. Caruso 16, Pisa, Italy

    Filippo Dell’Agnello, Simone Del Cesta & Paolo Bruschi

Authors
  1. Massimo Piotto
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  2. Filippo Dell’Agnello
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  3. Simone Del Cesta
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  4. Paolo Bruschi
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Corresponding author

Correspondence to Massimo Piotto .

Editor information

Editors and Affiliations

  1. University of Catania, Catania, Italy

    Bruno Andò

  2. IFAC-CNR, Sesto Fiorentino, Italy

    Francesco Baldini

  3. University of Rome Tor Vergata, Rome, Italy

    Corrado Di Natale

  4. University of Florence, Sesto Fiorentino, Italy

    Giovanna Marrazza

  5. IMM-CNR, Lecce, Italy

    Pietro Siciliano

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Piotto, M., Dell’Agnello, F., Del Cesta, S., Bruschi, P. (2018). Integrated Thermal Flow Sensors with Programmable Power-Sensitivity Trade-Off. In: Andò, B., Baldini, F., Di Natale, C., Marrazza, G., Siciliano, P. (eds) Sensors. CNS 2016. Lecture Notes in Electrical Engineering, vol 431. Springer, Cham. https://doi.org/10.1007/978-3-319-55077-0_1

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  • DOI: https://doi.org/10.1007/978-3-319-55077-0_1

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-55076-3

  • Online ISBN: 978-3-319-55077-0

  • eBook Packages: EngineeringEngineering (R0)

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