Abstract
This paper wants to study the possibility of generating predictable relative humidity variations with temperature on a capacitive humidity sensor. Software and a circuit temperature control will be analyzed. The precision of both systems is remarkable. A possible application is in the field of self-diagnostics for humidity sensors.
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Elkhayat, M., Mangiarotti, S., Grassi, M., Malcovati, P., Fornasari, A. (2018). Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology. In: Andò, B., Baldini, F., Di Natale, C., Marrazza, G., Siciliano, P. (eds) Sensors. CNS 2016. Lecture Notes in Electrical Engineering, vol 431. Springer, Cham. https://doi.org/10.1007/978-3-319-55077-0_48
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DOI: https://doi.org/10.1007/978-3-319-55077-0_48
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Online ISBN: 978-3-319-55077-0
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