Abstract
We generalize the Monte Carlo algorithm originally designed for small signal analysis of the three-dimensional electron gas to quasi-two-dimensional electron systems. The method allows inclusion of arbitrary scattering mechanisms and general band structure. Contrary to standard Monte Carlo methods to simulate transport, this algorithm takes naturally into account the fermionic nature of electrons via the Pauli exclusion principle. The method is based on the solution of the linearized Boltzmann equation and is exact in the limit of negligible driving fields. The theoretically derived Monte Carlo algorithm has a clear physical interpretation. The diffusion tensor is calculated as an integral of the velocity autocorrelation function. The mobility tensor is related to the diffusion tensor via the Einstein relation for degenerate statistics. We demonstrate the importance of degeneracy effects by evaluating the low-field mobility in contemporary field-effect transistors with a thin silicon body. We show that degeneracy effects are essential for the correct interpretation of experimental mobility data for field effect transistors in single- and double-gate operation mode. In double-gate structures with (100) crystal orientation of the silicon film degeneracy effects lead to an increased occupation of the higher subbands. This opens an additional channel for elastic scattering. Increased intersubband scattering compensates the volume inversion induced effect on the mobility enhancement and leads to an overall decrease in the mobility per channel in double-gate structures.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
International Technology Roadmap for Semiconductors — 2005 edn.(2005), http://www.itrs.net/Common/2005ITRS/Home2005.htm
Bosi, S., Jacoboni, C.: Monte Carlo High Field Transport in Degenerate GaAs. J. Phys. C: Solid State Phys. 9, 315–319 (1976)
Fischetti, M.V., Laux, S.E.: Monte Carlo Analysis of Electron Transport in Small Semiconductor Devices Including Band-Structure and Space-Charge Effects. Physical Review B 38, 9721–9745 (1988)
Jungemann, C., Pham, A.T., Meinerzhagen, B.: A Linear Response Monte Carlo Algorithm for Inversion Layers and Magnetotransport. In: Proc. Intl. Workshop Comput. Electronics, pp. 13–14 (May 2006)
Kosina, H., Nedjalkov, M., Selberherr, S.: Theory of the Monte Carlo Method for Semiconductor Device Simulation. IEEE Trans. Electron Devices 47, 1899–1908 (2000)
Likharev, K.K.: Sub-20-nm Electron Devices. In: Morkoc, H. (ed.) Advanced Semiconductor and Organic Nano-Techniques, pp. 239–302. Academic Press, New York (2003)
Lucci, L., et al.: Multi-Subband Monte-Carlo Modeling of Nano-MOSFETs with Strong Vertical Quantization and Electron Gas Degeneration. In: IEDM Techn. Dig., pp. 531–534 (2005)
Lugli, P., Ferry, D.K.: Degeneracy in the Ensemble Monte Carlo Method for High Field Transport in Semiconductors. IEEE Trans. Electron Devices 32, 2431–2437 (1985)
Reggiani, L., et al.: Diffusion and fluctuations in a nonequilibrium electron gas with electron-electron collisions. Phys. Rev. B 40, 12209–12214 (1989)
Smirnov, S., et al.: Monte Carlo Method for Modeling of Small Signal Response Including the Pauli Exclusion Principle. J. Appl. Phys. 94, 5791–5799 (2003)
Sverdlov, V., et al.: Mobility for High Effective Field in Double-Gate and Single-Gate SOI for Different Substrate Orientations. In: Proc. EUROSOI 2006, pp. 133–134 (March 2006)
Takagi, S.I., et al.: On the Universality of Inversion Layer Mobility in Si MOSFET’s: Part I — Effects of Substrate Impurity Concentration. IEEE Trans. Electron Devices 41, 2357–2362 (1994)
Uchida, K., Koga, J., Takagi, S.: Experimental Study on Carrier Transport Mechanisms in Double- and Single-Gate Ultrathin-Body MOSFETs — Coulomb Scattering, Volume Inversion, and δT SOI -induced Scattering. In: IEDM Techn. Dig., pp. 805–808 (2003)
Ungersboeck, E., Kosina, H.: The Effect of Degeneracy on Electron Transport in Strained Silicon Inversion Layer. In: Proc. Intl. Conf. on Simulation of Semiconductor Processes and Devices, pp. 311–314 (2005)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Sverdlov, V., Ungersboeck, E., Kosina, H. (2008). Monte Carlo Algorithm for Mobility Calculations in Thin Body Field Effect Transistors: Role of Degeneracy and Intersubband Scattering. In: Lirkov, I., Margenov, S., Waśniewski, J. (eds) Large-Scale Scientific Computing. LSSC 2007. Lecture Notes in Computer Science, vol 4818. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-78827-0_16
Download citation
DOI: https://doi.org/10.1007/978-3-540-78827-0_16
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-78825-6
Online ISBN: 978-3-540-78827-0
eBook Packages: Computer ScienceComputer Science (R0)