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Design and Analysis of Vacuum Robot for Cluster Tools

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Intelligent Robotics and Applications (ICIRA 2008)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 5314))

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Abstract

In this paper, a SCARA type vacuum robot for cluster tools has been designed, which can transfer semiconductor wafers in high vacuum chamber.The robot should be able to perform radial linear extending and retracting movement R, rotation movement θ, and vertically up-down movement Z. The rotation and radial linear movements are driven by direct drive motors which located in atmosphere environment, two magnetic couplings are applied to transmit the torques from atmosphere to vacuum environment. The dynamics model of the robot is builded, control system is set up.

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References

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Author information

Authors and Affiliations

  1. State Key Lab. of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dong Chuan Road, Shanghai, 200240, P.R. China

    Jun Wu, PinKuan Liu & YuLin Wang

Authors
  1. Jun Wu
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  2. PinKuan Liu
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  3. YuLin Wang
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Editor information

Editors and Affiliations

  1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 430074, Wuhan, China

    Caihua Xiong , Yongan Huang  & Youlun Xiong ,  & 

  2. Institute of Industrial Research, University of Portsmouth, Burnaby Building, PO1 3QL, Portsmouth, UK

    Honghai Liu

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© 2008 Springer-Verlag Berlin Heidelberg

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Wu, J., Liu, P., Wang, Y. (2008). Design and Analysis of Vacuum Robot for Cluster Tools. In: Xiong, C., Huang, Y., Xiong, Y., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5314. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88513-9_31

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  • DOI: https://doi.org/10.1007/978-3-540-88513-9_31

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-88512-2

  • Online ISBN: 978-3-540-88513-9

  • eBook Packages: Computer ScienceComputer Science (R0)

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