Abstract
Analyze the synchronous motion process of the step and scan projection lithography. Classify the subsystems of the machine into synchronous master subsystems and synchronous slave subsystems; realize the state broadcasting of synchronous master subsystem by synchronous serial bus; analyze the communication among subsystems and their data-collection systems and realize the communication using high speed serial hotlink. In order to validate the synchronization mechanism, a synchronous experimental platform is established. The experimental result shows the system is stable, Creliable and satisfied with the requirements of synchronization and engineering.
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© 2008 Springer-Verlag Berlin Heidelberg
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Yang, L., Zhou, Y., Pan, H., Teng, W. (2008). Realization of the Synchronization Mechanism of Step and Scan Projection Lithography. In: Xiong, C., Liu, H., Huang, Y., Xiong, Y. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5315. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88518-4_17
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DOI: https://doi.org/10.1007/978-3-540-88518-4_17
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-88516-0
Online ISBN: 978-3-540-88518-4
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