Abstract
Precision positioning stage is the key part of precision feed system of a machine. To compensate for the effect of processing precision affected by the vibration of wheelhead of precision grinder, a micro-feed worktable using piezoelectric actuators, which serves as an auxiliary feeding device, has been introduced for common cylindrical grinders. The stiffness of its support-oriented mechanism is modeled and analyzed by PRO/E and FEA. A close-loop control system based on special algorithm is presented and the prototype of a macro-micro driven ultra-precision positioning stage on grinder is developed. The experimental results show that the positioning accuracy of the stage is 0.1±0.02 μm, its average stiffness is 207 N/μm and the cylindricity of machined parts is less than 2 μm.
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© 2008 Springer-Verlag Berlin Heidelberg
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Zhang, J., Li, B., Xu, Y., Yang, J. (2008). Macro-micro Driven Ultra-Precision Positioning Stage for Conventional Grinder. In: Xiong, C., Liu, H., Huang, Y., Xiong, Y. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5315. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88518-4_91
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DOI: https://doi.org/10.1007/978-3-540-88518-4_91
Publisher Name: Springer, Berlin, Heidelberg
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