Abstract
To the majority of existing studies of semiconductor wafer fabrication system scheduling, simple scheduling rule is not capable to realize the multi-objective optimization. Usually combined scheduling criteria may be paid diverse emphases which are represented by weights. This paper proposed a successful application of fuzzy cognitive map concept on the scheduling of wafer fabrication system scheduling. The first step is to define the common scheduling rules which represent the single optimization objectives and then develop the approach of combined scheduling rules to determine the weight values of different rules in which the fuzzy cognitive map approach is applied to offer the solution effectively considering the goal of combined scheduling criteria. Be compared with the simple scheduling rule by a case study, the proposed approach is certified as a practical and useful way to realize the real-time scheduling optimization.
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Liang, F. (2009). Combined Scheduling Criteria Approach for Semiconductor Wafer Fabrication System Based on Fuzzy Cognitive Maps. In: Cao, B., Li, TF., Zhang, CY. (eds) Fuzzy Information and Engineering Volume 2. Advances in Intelligent and Soft Computing, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03664-4_141
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DOI: https://doi.org/10.1007/978-3-642-03664-4_141
Publisher Name: Springer, Berlin, Heidelberg
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