Abstract
In this paper, a Petri net-based logic and sequence control model of photo mask transport was constructed. A characteristic analysis was made on the established Petri net model in behavior and structure. This checked the safeness and reliability of the constructed control model off line. In order to implement the Petri net-based control model of photo mask transport via a Programmable Logic controller (PLC), an approach was proposed to generate Ladder Logic Diagram (LLD) programs from the Petri net-based control model. Execution of the generated LLD programs validated the effectiveness of the proposed method.
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Liu, Y. (2009). A Petri Net-Based Ladder Logic Diagram Design Method for the Logic and Sequence Control of Photo Mask Transport. In: Huang, DS., Jo, KH., Lee, HH., Kang, HJ., Bevilacqua, V. (eds) Emerging Intelligent Computing Technology and Applications. ICIC 2009. Lecture Notes in Computer Science, vol 5754. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-04070-2_83
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DOI: https://doi.org/10.1007/978-3-642-04070-2_83
Publisher Name: Springer, Berlin, Heidelberg
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