Abstract
This paper presents an improved robust control of a high speed high precision XY-table linear motion system used in semiconductor wire bonding machine. H ∞ robust control is implemented in both inner velocity loop and outer position loop to achieve high and consistent control performance even in the presence of considerable resonance uncertainties and external disturbances. Auto-tuned feed-forward compensation based on fuzzy logic method is employed to obtain satisfactory dynamic and settling performance. High close loop bandwidth has been yielded, and high acceleration of 20g (1g = 9.81m/s2), high speed of 0.9m/s can be achieved with the dynamic error of 2 μm, settling error of 1.2μm and static error of 0.2μm.
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© 2011 Springer-Verlag Berlin Heidelberg
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Zhang, C., Yang, X., Xiao, Y., Zhao, G. (2011). Robust Control of High Speed High Precision Linear Motion System. In: Zeng, D. (eds) Applied Informatics and Communication. ICAIC 2011. Communications in Computer and Information Science, vol 225. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-23220-6_30
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DOI: https://doi.org/10.1007/978-3-642-23220-6_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-23219-0
Online ISBN: 978-3-642-23220-6
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