Abstract
The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Brokate, M., Sprekels, J.: Hysteresis and Phase Transitions. Springer, New York (1996)
Chen, X., Hisayama, T.: Adaptive sliding mode position control for piezo-actuated stage. IEEE Transactions on Industrial Electronics 55, 3927–3934 (2008)
Fleming, A.J., Moheimani, S.O.R.: Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners. IEEE Trans. on Control Systems Technology 14, 33–44 (2007)
Iyer, R.V., Tan, X., Krishnaprasad, P.S.: Approximate Inversion of the Preisach Hysteresis Operator with Application to Control of Smart Actuators. IEEE Transactions on Automatic Control 50, 798–810 (2005)
Krejci, P., Kuhnen, K.: Inverse control of systems with hysteresis and creap. Proc. Inst. Elect. Eng. Control Theory Applications 148, 185–192 (2001)
Kuhnen, K., Krejci, P.: Compensation of complex hysteresis and creep effects in piezoelectrically actuated systems – A new Preisach modeling approach. IEEE Transactions on Automatic Control 54, 537–550 (2009)
Su, C.-Y., Wang, Q., Chen, X., Rakheja, S.: Adaptive variable structure control of a class of nonlinear systems with unknown Prandtl-Ishlinskii hysteresis. IEEE Transactions on Automatic Control 50, 2069–2074 (2005)
Tao, G., Kokotovic, P.V.: Adaptive control of plants with unknown hysteresis. IEEE Trans. on Automatic Control 40, 200–212 (1995)
Tan, X., Baras, J.S.: Modeling and control of hysteresis in magnetostrictive actuators. Automatica 40, 1469–1480 (2004)
Visintin, A.: Differential Models of Hysteresis. Springer, New York (1994)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2012 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Chen, X. (2012). Advanced High Precision Control for XY-Table. In: Su, CY., Rakheja, S., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2012. Lecture Notes in Computer Science(), vol 7506. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33509-9_2
Download citation
DOI: https://doi.org/10.1007/978-3-642-33509-9_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-33508-2
Online ISBN: 978-3-642-33509-9
eBook Packages: Computer ScienceComputer Science (R0)