Abstract
This paper presents a digital lock-in amplifier (DLIA) based technique to detect the template-substrate contact in electrochemical nanolithography. This technique is applied to a specially designed electrochemical nanolithography system for verification. The system adopts a macro-micro positioning setup consisting of a fine stepping motor to drive the macropositioning stage and a PZT(lead zirconate titanate, Pb[ZrxTi1 − x]O3) actuator to drive the micropositioning stage. The template is mounted on a force-displacement sensing module which is attached to the PZT actuated micropositioning stage and the substrate is mounted on a holder which is merged in the solution. When the template approaches the substrate, it is controlled to oscillate at a certain frequency. Two capacitive displacement sensors are used to measure the template oscillation. Afterwards, a digital lock-in amplifier is adopted to separate the oscillation information from the raw signal. The contact is determined by monitoring the separated oscillation information. Finally, experiment tests are conducted to verify the effectiveness of the digital lock-in amplifier. Experimental results demonstrate that the developed DLIA technique makes the template-substrate contact to nanometer accuracy.
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References
Simeone, F.C., Albonetti, C., Cavallini, M.: Progress in Micro- and Nanopatterning via Electrochemical Lithography. The Journal of Physical Chemistry C 113, 18987–18994 (2009)
Zhang, L., Ma, X.Z., Zhuang, J.L., Qiu, C.K., Du, C.L., Tang, J., Tian, Z.W.: Microfabrication of a Diffractive Microlens Array on n - GaAs by an Efficient Electrochemical Method. Advanced Materials 19, 3912–3918 (2007)
Devasia, S., Eleftheriou, E., Moheimani, S.O.R.: A survey of control issues in nanopositioning. IEEE Transactions on Control Systems Technology 15, 802–823 (2007)
Gu, G.Y., Zhu, L.M.: High-speed tracking control of piezoelectric actuators using an ellipse-based hysteresis model. Review of Scientific Instruments 81, 085–104 (2010)
Gao, W., Hocken, R.J., Patten, J.A., Lovingood, J., Lucca, D.A.: Construction and testing of a nanomachining instrument. Precision Engineering 24, 320–328 (2000)
Nohava, J., Randall, N., Conté, N.: Novel ultra nanoindentation method with extremely low thermal drift: Principle and experimental results. Journal of Materials Research 24, 873–882 (2009)
Ahmed, N., Carlson, A., Rogers, J.A., Ferreira, P.M.: Automated micro-transfer printing with cantilevered stamps. Journal of Manufacturing Processes 14, 90–97 (2012)
Remillard, P.A., Amorelli, M.C.: Lock-in amplifier. US Patent. US5210484 (1993)
Gaspar, J., Chen, S.F., Gordillo, A., Hepp, M., Ferreyra, P., Marqués, C.: Digital lock in amplifier: study, design and development with a digital signal processor. Microprocessors and Microsystems 28, 157–162 (2004)
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© 2012 Springer-Verlag Berlin Heidelberg
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Zhou, SY., Lai, LJ., Gu, GY., Zhu, LM. (2012). A Digital Lock-In Amplifier Based Contact Detection Technique for Electrochemical Nanolithography. In: Su, CY., Rakheja, S., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2012. Lecture Notes in Computer Science(), vol 7507. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33515-0_32
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DOI: https://doi.org/10.1007/978-3-642-33515-0_32
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-33514-3
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