Abstract
The noise signal influences the stage positioning accuracy in the process of the nano stage motion, for which designs a Kalman filter to filter out noise effectively. The model of nano-positioning stage is established. Then the motion of stage is estimated by using Kalman filtering model, and the filtering effect of Kalman filter can be observed in the Matlab. Experimental results show that Kalman filtering can effectively reduce the positioning deviation, which is less than 4nm, and positioning accuracy has been improved significantly. Kalman filter has a good effect on filtering and can meet the requirement of positioning precision for nano-positioning stage.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Zhu, Y., Bazaei, A., Moheimani, S.O.R., Yuce, M.R.: Design, prototyping, modeling and control of a MEMS nanopositioning stage. In: American Control Conference, pp. 2278–2283 (2011)
Yu, R.H., Cai, J.X., Ma, H.R., Li, Y.Q.: Sorting Control System Design of New Materials Sorter Based on FPGA. Int. J. Control Autom. 7, 253–264 (2014)
Wang, S.S., Fan, L.B., Chen, G., He, T.: Three-dimensional micro-displacement control system for a conductor defect detection system. Advanced Materials Research (2012). doi:10.4028/www.scientific.net/AMR.588-589.1431
Zhu, D.H., Li, Z.H., Tian, X.X.: Ant Colony Optimization Control in VAV System. Journal of Shenyang Jianzhu University (Natural Science) 28, 1131–1135 (2012)
Li, Y., Sun, Y.F.: Development of Actuation Control System of Piezoelectric Micro-Displacement Device Based on Increment PID Algorithm. Meas. Control Tech. 30, 40–44 (2011)
Dai, J., Shen, J., Shao, M., Bai, L.X.: Design and implementation of filter in the control system of the high accuracy micro-displacement platform. International Journal of Modelling, Identification and Control 21, 82–92 (2014)
Zhou, Y., Yao, X.X., Pian, J.X., Su, Y.Q.: Band-stop filter algorithm research based on nano-displacement positioning system. Appl. Mech. Mater (2013). doi:10.4028/www.scientific.net/AMM.380-384.697
Fu, M.Y., Deng, Z.H., Yan, L.P.: Kalman filtering theory and its application in navigation system. Scientific Publishers (2010)
Li, K.Q.: The application research on 6-RSS parallel institution in the six-dimensional active vibration platform. doctoral thesis of Beijing Jiaotong University (2008)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2016 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Dai, J., Qu, P., Shao, M., Zhang, H., Mao, Y. (2016). The Design of Kalman Filter for Nano-Positioning Stage. In: Kim, J., Geem, Z. (eds) Harmony Search Algorithm. Advances in Intelligent Systems and Computing, vol 382. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47926-1_8
Download citation
DOI: https://doi.org/10.1007/978-3-662-47926-1_8
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47925-4
Online ISBN: 978-3-662-47926-1
eBook Packages: EngineeringEngineering (R0)