Abstract
A BISR (Built-in Self-Repairable) MEMS comb accelerometer with modularized design has been previously reported. In this paper, the differential capacitance sensing circuitry for MEMS comb accelerometer is discussed. The BISR control circuitry based on CMOS transmission gates (TGs) is proposed. Each BISR module is connected to the capacitance sensing circuitry through a transmission gate. By turning on or off a transmission gate, the corresponding module can be either connected to or isolated from the capacitance sensing circuitry. In this way, the faulty module can be easily replaced with a good redundant module for self-repair. The parasitic model for the BISR control circuitry is also analyzed. The analysis results show that the parasitic capacitance will not affect the proper operation of the BISR control circuitry. Furthermore, the signal strength will not be degraded due to the insertion of analog multiplexers. The control circuitry can effectively isolate the faulty module of the BISR MEMS comb accelerometer. Both BISR and non-BISR MEMS accelerometer designs are suggested and their performances are also extracted for comparison.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Navid Yazdi, Farrokh Ayazi, and Khalil Najafi, “Micromachined Inertial Sensors”, Proceedings of the IEEE, Vol. 86, No. 8, Aug. 1998, pp. 1640-1659.
W. Kuehnel, and S. Sherman, ”A Surface Micromachined Silicon Accelerometer with On-chip Detection Circuitry,” Sensors and Actuators A: Physical, Vol. 45, pp. 7-16, 1994.
“ADXL150/ADXL250: ←5 g to ←50 g, Low Noise, Low Power, Single/ Dual Axis iMEMS Accelerometers”, ADXL150/ADXL250 datasheet, URL: http://www.analog.com.
B. Stark (editor), “MEMS Reliability Assurance Guidelines for Space Applications”, Jet Propulsion Laboratory Publication 99-1, Pasadena, USA, Jan. 1999.
X. Xiong, Y. Wu, and W. Jone, "Design and analysis of self-repairable MEMS accelerometer," Proceedings of the 20th IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems (DFT'05), Monterey, CA, USA, pp. 21-29, Oct. 3-5, 2005.
X. Xiong, Y. Wu, and W. Jone, “Reliability Analysis of Self-Repairable MEMS Accelerometer”, Proc. of 21th IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems (DFT'06), pp. 236-244, Arlington, VA, USA, Oct. 2006.
S. Ogawa, Y. Oisugi, K. Mochizuki, and K. Watanabe, ”A Switched-Capacitor Interface for Differential Capacitance Transducers”, IEEE Transactions on Instrumentation and Measurement, Vol. 50, Issue 5, pp. 1296-1301, 2001.
S. Chatzandroulis, D. Tsoukalns, ”Capacitance to Frequency Converter Suitable for Sensor Applications Using Telemetry”, Analog Integrated Circuits and Signal Processing, Vol. 27, No. 1-2, pp. 31-38, Apr. 2001.
J. C. Lotters, W. Olthuis, P. H. Veltink, and P. A. Bergveld, ”A sensitive differential capacitance to voltage converter for sensor applications”, IEEE Transaction on Instrumentation and Measurement, Vol. 48, Issue 1, pp. 89-96, 1999.
K. Mochizuki, K. Watanabe, T. Masuda, and M. Katsura, ”A Relaxation-Oscillator-Based Interface for High-Accuracy Ratiometric Signal Processing of Differential-Capacitance Transducers”, IEEE Transactions on Instrumentation and Measurement, Vol. 47, Issue 1, pp. 11-15, 1998.
K. Mochizuki, T. Masuda, and K. Watanabe, “An Interface Circuit for High-Accuracy Signal Processing of Differential-Capacitance Transducers”, IEEE Transactions on Instrumentation and Measurement, Vol. 47, No. 4, pp. 823-827, Aug. 1998.
X. Xiong, Y. Wu, and W. Jone, “A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices”, IEEE Transactions on Instrumentation and Measurement, Vol. 54, No. 5, pp. 1739-1750, Oct. 2005.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2010 Springer Science+Business Media B.V.
About this paper
Cite this paper
Xiong, X., Wu, YL., Jone, WB. (2010). Control Circuitry for Self-Repairable MEMS Accelerometers. In: Iskander, M., Kapila, V., Karim, M. (eds) Technological Developments in Education and Automation. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3656-8_49
Download citation
DOI: https://doi.org/10.1007/978-90-481-3656-8_49
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-3655-1
Online ISBN: 978-90-481-3656-8
eBook Packages: Humanities, Social Sciences and LawEducation (R0)