Skip to main content
SpringerLink
Log in

SOA Based Equipment Data Management System for Smart Factory

  • Conference paper
  • First Online:
Advances in Computer Science and Ubiquitous Computing (UCAWSN 2016, CUTE 2016, CSA 2016)

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 421))

  • 1722 Accesses

Abstract

In this paper we introduce a SOA based EDA system complied with SEMI Standards for smart factory in semiconductor manufacturing filed To design the system that is used to integrate information systems in the factory, we analyze the requirements of EDA system in the prospect of the components of the information systems. We build a prototype for an EDA system including EDA Host and EDA Client in EDA SEMI standards.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. May, G.S., Spanos, C.J.: Fundamentals of Semiconductor Manufacturing and Process Control. Wiley, New York (2006)

    Book  Google Scholar 

  2. Zuehlke, D.: Smartfactory–from vision to reality in factory technologies. IFAC Proc. 41(2), 14101–14108 (2008)

    Article  Google Scholar 

  3. Lucke, D., Constantinescu, C., Westkämper, E.: Smart factory - a step towards the next generation of manufacturing. In: Mitsuishi, M., Ueda, K., Kimura, F. (eds.) Manufacturing Systems and Technologies for the New Frontier: The 41st CIRP Conference on Manufacturing Systems, pp. 115–118. Springer, London (2008)

    Chapter  Google Scholar 

  4. Li-Baboud, Y.S., Zhu, X., Anand, D.M., Hussaini, S., Moyne, J.R.: Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis. In: Proceedings of IEEE ISPCS (2008)

    Google Scholar 

  5. Erl, T.: Service-Oriented Architecture: Concepts, Technology, and Design. Prentice Hall PTR, Upper Saddle River (2005)

    Google Scholar 

  6. Spiess, P., Karnouskos, S., Guinard, D., Savio, D., Baecker, O., Souza, L.M.S.D., Trifa, V.: SOA-based integration of the internet of things in enterprise services. In: IEEE International Conference on Web Services, ICWS 2009, pp. 968–975, Los Angeles, CA, USA (2009)

    Google Scholar 

  7. SEMI E120-1.V1104 specification for the common equipment model

    Google Scholar 

  8. SEMI E125-1.V0305 specification for equipment self description

    Google Scholar 

  9. SEMI E132-1.V0305 specification for equipment client authentication and authorization

    Google Scholar 

  10. SEMI E134-1.V1105 specification for data collection management

    Google Scholar 

Download references

Acknowledgements

This work (Grants No. C0395837) was supported by Business for Cooperative R&D between Industry, Academy, and Research Institute funded Korea Small and Medium Business Administration in 2016.

Author information

Authors and Affiliations

  1. Division of Information Communication, Baekseok University, 115 Anseo-Dong, Cheonan, Chungnam, 330-704, Korea

    YunHee Kang & Kyoungwoo Kang

  2. DeviceEng Co., Ltd., 169 Eumbong-Ro, Eumbong-Myeon, Asan-si, Chungnam, 336-864, Korea

    Soong-ho Ko

Authors
  1. YunHee Kang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Soong-ho Ko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kyoungwoo Kang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Kyoungwoo Kang .

Editor information

Editors and Affiliations

  1. Computer Science and Engineering, Seoul National University of Science and Technology, Seoul, Korea (Republic of)

    James J. (Jong Hyuk) Park

  2. Department of Computer Science, Georgia State University, Atlanta, Georgia, USA

    Yi Pan

  3. Computer Science and Engineering, Gangneung-Wonju National University, Wonju, Korea (Republic of)

    Gangman Yi

  4. University Salerno, Fisciano, Italy

    Vincenzo Loia

Rights and permissions

Reprints and permissions

Copyright information

© 2017 Springer Nature Singapore Pte Ltd.

About this paper

Cite this paper

Kang, Y., Ko, Sh., Kang, K. (2017). SOA Based Equipment Data Management System for Smart Factory. In: Park, J., Pan, Y., Yi, G., Loia, V. (eds) Advances in Computer Science and Ubiquitous Computing. UCAWSN CUTE CSA 2016 2016 2016. Lecture Notes in Electrical Engineering, vol 421. Springer, Singapore. https://doi.org/10.1007/978-981-10-3023-9_7

Download citation

  • DOI: https://doi.org/10.1007/978-981-10-3023-9_7

  • Published:

  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-3022-2

  • Online ISBN: 978-981-10-3023-9

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation