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Assessing the Performance of CMOS Amplifiers Using High-k Dielectric with Metal Gate on High Mobility Substrate

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Advances in Computing and Data Sciences (ICACDS 2018)

Part of the book series: Communications in Computer and Information Science ((CCIS,volume 905))

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Abstract

With the increase in demand for high-performance ICs for both memory and logic applications, scaling has been continued down to 14 nm node. To meet the performance requirements, high-k dielectrics such as HfO\(_2\), ZrO\(_2\) have replaced SiO\(_2\) in the conventional MOS structure for sub-45 nm node. Correspondingly, the polysilicon gate electrode has been replaced by metal gate electrode in order to enable integration with high-k. Furthermore, the standard silicon substrate has been replaced by high mobility substrate in order to obtain desired transistor performance. While the fabrication technology for CMOS has advanced rapidly the traditional design tools used for designing circuits continues to use conventional MOS structure and their properties. This paper aims to analyze frequency response of CMOS common source amplifier(CSA) and differential amplifier by simulating in MATLAB using metal gate/high-k/Ge structure and to compare with traditionally used amplifier design using standard MOS structure.

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References

  1. Mack, C.A.: Fifty years of Moore’s law. IEEE Trans. Semicond. Manuf. 24(2), 202–207 (2011)

    Article  Google Scholar 

  2. Ravindran, A., Balamurugan, K., Jayakumar, M.: Design of cascaded common source low noise amplifier for s-band using transconductance feedback. Indian J. Sci. Technol. 9(16) (2016)

    Google Scholar 

  3. Vinod, B., Balamurugan, K., Jayakumar, M.: Design of CMOS based reconfigurable LNA at millimeter wave frequency using active load. In: ICACCCT 2014, IEEE-Explore, pp. 713–718 (2014)

    Google Scholar 

  4. Seshan, K.: Limits and hurdles to continued CMOS scaling. In: Handbook of Thin Film Deposition. 4th edn. Science Direct (2018)

    Google Scholar 

  5. He, G., Zhu, L., et al.: Integrations and challenges of novel high-k gate stacks in advanced CMOS technology. In: Progress in Materials Science. Elsevier (2011)

    Google Scholar 

  6. Gardner, M.I., Gopalan, S., et al.: EOT Scaling and Device Issues for High-k Gate Dielectrics. IEEE (2003)

    Google Scholar 

  7. Gopalan, S., Onishi, K.: Electrical and physical characteristics of Ultrathin Hafnium Silicate films with polycrystalline silicon and TaN gates. Appl. Physics Lett. 80(23), 4416–4418 (2002)

    Article  Google Scholar 

  8. Wilk, G.D., Wallace, R.M., Anthony, J.M.: Hafnium and zirconium silicates for advanced gate dielectrics. J. Appl. Phys. 15(1), 484 (2000)

    Article  Google Scholar 

  9. Nam, S.-W.: Characteristics of ZrO2 films with Al and Pt gate electrodes. J. Electrochem. Soc. 150, G849–G853 (2003)

    Article  Google Scholar 

  10. Frank, M.M.: High-k/metal gate innovations enabling continued CMOS scaling. In: Solid-State Device Research Conference (ESSDERC) (2011)

    Google Scholar 

  11. Pillarisetty, R.: Academic and industry research progress in germanium nanodevices. Nature 479(7373), 324 (2011)

    Article  Google Scholar 

  12. Razavi, B.: Design of Analog CMOS ICs. McGraw-Hill (2001)

    Google Scholar 

  13. Chui, C.O., et al.: A Sub-400\(^o\)C Germanium MOSFET Technology with High-K Dielectric and Metal Gate. IEEE (2002)

    Google Scholar 

  14. Chau, R.: High-k/metal-gate stack and its MOSFET characteristics. IEEE Electron. Dev. Lett. 25(6), 408–410 (2004)

    Article  MathSciNet  Google Scholar 

  15. Whang, S.J., et al.: Germanium’p- and n-MOSFETs Fabricated with Novel Surface Passivation (plasma-PH3 and thin AIN) and TaN/HfO\(_2\) Gate Stack. IEEE (2004)

    Google Scholar 

  16. Del Alamo, J.A.: Nanometre-scale electronics with III-V compound semiconductors. Nature 479, 317–323 (2011)

    Article  Google Scholar 

  17. Hwang, J.R., et al.: Performance of 70 nm strained-silicon CMOS devices. In: Symposium on VLSI Technology Digest of Technical Papers (2003)

    Google Scholar 

  18. Wu, N., et al.: Characteristics of Self-Aligned Gate-First Ge p- and n-Channel MOSFETs Using CVD HfO2 Gate Dielectric and Si Surface Passivation. IEEE (2007)

    Google Scholar 

  19. Robertson, J., Wallace, R.M.: High-K materials and metal gates for CMOS applications. In: Materials Science and Engineering R. Elsevier (2015)

    Google Scholar 

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Correspondence to Deepa Anand or M. Swathi .

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Anand, D., Swathi, M., Purushothaman, A., Gopalan, S. (2018). Assessing the Performance of CMOS Amplifiers Using High-k Dielectric with Metal Gate on High Mobility Substrate. In: Singh, M., Gupta, P., Tyagi, V., Flusser, J., Ören, T. (eds) Advances in Computing and Data Sciences. ICACDS 2018. Communications in Computer and Information Science, vol 905. Springer, Singapore. https://doi.org/10.1007/978-981-13-1810-8_28

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  • DOI: https://doi.org/10.1007/978-981-13-1810-8_28

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  • Print ISBN: 978-981-13-1809-2

  • Online ISBN: 978-981-13-1810-8

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