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A Flexible and Highly Sensitive Ultrasonic Transducer for Accurate Three-Dimensional Positioning

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Intelligent Robotics and Applications (ICIRA 2023)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 14267))

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Abstract

Three-dimensional (3D) positioning enables the precise localization and processing of objects and has been regarded as a vital technology with diverse applications in numerous fields. This paper presents a novel ultrasonic transducer with high sensitivity and flexibility for detecting 3D positions of target objects. The proposed flexible transducer features a 1 × 3 array of 1–3 piezoelectric composites that exploits copper (Cu) for interconnection and is encapsulated by thin and flexible polyimide (PI) films. Thus, this design allows the transducer to be folded to confirm to intersecting surfaces. The 1–3 composite with high electromechanical coupling efficiency can convert electrical voltages into mechanical vibration to excite ultrasonic waves. A fabrication method using magnetron sputtering was developed to fabricate the flexible ultrasonic transducer. Experimental tests showed that the developed transducer exhibited a resonant frequency of approximately 4.79 MHz, good electromechanical coupling (keff = 0.568), wide bandwidth (34.7%), and a broad measuring range over 12 cm propagation distance with a diffusion angle of 28.08°. Three elements of ultrasonic transducer are covered onto an orthogonal plane to cross-locate the objects under water environment. The experimental results showed that the proposed ultrasonic transducer achieved over 94.14% accuracy for 3D positioning. Therefore, our developed ultrasonic transducer indicates the potential for the applications requires 3D positioning and positioning detection.

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Acknowledgments

This work was supported in part by the National Natural Science Foundation of China (Grant No. 52175522), Fundamental Research Funds for the Central Universities (Grant No. 2022FZZX01–06) and Science Foundation of Donghai Laboratory (Grant No. DH-2022KF01002).

Author information

Authors and Affiliations

  1. State Key Lab of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou, 310058, China

    Zhange Zhang & Yancheng Wang

  2. Zhejiang Province Key Laboratory of Advanced Manufacturing Technology, School of Mechanical Engineering, Zhejiang University, Hangzhou, 310058, China

    Zhange Zhang, Zhongtan Zhang, Jiarui He & Yancheng Wang

  3. Donghai Laboratory, Zhoushan, 316021, China

    Zhongtan Zhang & Yancheng Wang

Authors
  1. Zhange Zhang
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  2. Zhongtan Zhang
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  3. Jiarui He
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  4. Yancheng Wang
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Corresponding author

Correspondence to Yancheng Wang .

Editor information

Editors and Affiliations

  1. Zhejiang University, Hangzhou, China

    Huayong Yang

  2. Harbin Institute of Technology, Shenzhen, China

    Honghai Liu

  3. Zhejiang University, Hangzhou, China

    Jun Zou

  4. Huazhong University of Science and Technology, Wuhan, China

    Zhouping Yin

  5. Shenyang Institute of Automation, Shenyang, Liaoning, China

    Lianqing Liu

  6. Zhejiang University, Hangzhou, China

    Geng Yang

  7. Zhejiang University, Hangzhou, China

    Xiaoping Ouyang

  8. Harbin Institute of Technology, Shenzhen, China

    Zhiyong Wang

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© 2023 The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

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Zhang, Z., Zhang, Z., He, J., Wang, Y. (2023). A Flexible and Highly Sensitive Ultrasonic Transducer for Accurate Three-Dimensional Positioning. In: Yang, H., et al. Intelligent Robotics and Applications. ICIRA 2023. Lecture Notes in Computer Science(), vol 14267. Springer, Singapore. https://doi.org/10.1007/978-981-99-6483-3_43

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  • DOI: https://doi.org/10.1007/978-981-99-6483-3_43

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-99-6482-6

  • Online ISBN: 978-981-99-6483-3

  • eBook Packages: Computer ScienceComputer Science (R0)

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