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A New Readout Circuit with Robust Quadrature Error Compensation for MEMS Vibratory Gyroscopes

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Abstract

This paper presents a front-end readout circuit for the vibratory MEMS gyroscope. The overall high dynamic range performance of the readout circuits is achieved by reducing the quadrature error signal through an additional proposed feedback path in the readout circuit. It is shown that the proposed readout can tolerate the demodulator phase error. The readout has been designed and simulated in the standard \(0.18\,\upmu \mathrm{m}\) CMOS technology. Compared to the conventional structure, the simulation results show about \(19~\mathrm{dB}\) dynamic range improvement in the proposed closed-loop readout. The readout circuit achieves \(1.7~\mathrm{aF}\) capacitive resolution at \( 100~\mathrm{Hz}\) signal bandwidth and \( 95.5~\mathrm{dB}\) dynamic range. The deviation due to the 1-degree phase error of the demodulator is reduced by about \(95\%\). Moreover, the 2nd harmonic component at the output of the demodulator has been significantly reduced. The readout draws \(0.6~\mathrm{mA}\) from a \( 1.8~\mathrm{V}\) supply.

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Data Availability Statement

Data sharing is not applicable to this article as no datasets were generated or analyzed during the current study.

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Authors and Affiliations

  1. Department of Electrical Engineering, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran

    Siamak Zargari & Mohsen Moezzi

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  1. Siamak Zargari
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  2. Mohsen Moezzi
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Correspondence to Mohsen Moezzi.

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Zargari, S., Moezzi, M. A New Readout Circuit with Robust Quadrature Error Compensation for MEMS Vibratory Gyroscopes. Circuits Syst Signal Process 41, 3050–3065 (2022). https://doi.org/10.1007/s00034-021-01941-0

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