Skip to main content

Advertisement

Springer Nature Link
Log in

Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets

  • Regular Article
  • Published:
OR Spectrum Aims and scope Submit manuscript

Abstract

This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are required to achieve high-performance. The problem can be solved in a hierarchical way. A deadlock avoidance policy is developed for the system as a lower-layer controller. With the support of the deadlock avoidance policy, heuristic rules are proposed to schedule the system in real-time. An effective modeling tool, colored–timed resource-oriented Petri net, is presented. It is shown that with this model we can schedule a system to achieve satisfactory results in real-time. This method is tolerant to module failures.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  • Coffman EG Jr, Elphick MJ, Shoshani A (1972) System deadlocks. ACM Comput Surv 3(2):67–78

    Article  Google Scholar 

  • Cormen T, Leiserson C, Rivest R (1994) Introduction to algorithms. McGraw-Hill, New York

    Google Scholar 

  • Fanti MP, Maione B, Mascolo S, Turchiano B (1997) Event-based feedback control for deadlock avoidance in flexible production systems. IEEE Trans Robot Autom 13:347–363

    Article  Google Scholar 

  • Jeng MD, Chen SC (1998) A heuristic search approach using approximate solutions of Petri net state equations for scheduling flexible manufacturing systems. Int J Flex Manuf Syst 10(2)

  • Johri PK (1993) Practical issues in scheduling and dispatching in semiconductor wafer fabrication. J Manuf Syst 12:74–485

    Article  Google Scholar 

  • Kim CO, Kim SS (1997) An effective real-time deadlock-free control for automated manufacturing systems. Int J Prod Res 35(6):1545–1560

    Article  Google Scholar 

  • Lawley MA (1999) Deadlock avoidance for production systems with flexible routing. IEEE Trans Robot Autom 15(3):497–509

    Article  Google Scholar 

  • Lawley M, Reveliotis S, Ferreira P (1998) A correct and scalable deadlock avoidance policy for flexible manufacturing systems. IEEE Trans Robot Autom 14:796–809

    Article  Google Scholar 

  • Lee DY, DiCesare F (1994) Scheduling flexible manufacturing system using Petri nets and heuristic search. IEEE Trans Robot Autom 10(2):123–132

    Article  Google Scholar 

  • Murata T (1989) Petri nets: properties, analysis, and application. Proc IEEE 77:541–579

    Article  Google Scholar 

  • Reveliotis SA, Ferreira PM (1996) Deadlock avoidance policies for automated manufacturing cells. IEEE Trans Robot Autom 12(6):845–857

    Article  Google Scholar 

  • Reveliotis SA, Lawley M, Ferreira P (1997) Polynomial complexity deadlock avoidance policies for sequential resource allocation systems. IEEE Trans Automat Contr 42:1344–1357

    Article  Google Scholar 

  • Roszkowska E, Jentink J (1993) Minimal restrictive deadlock avoidance in AMS. In: Proceedings of the 2nd European Control Conference ECC ’93, Groningen, pp 530–534

  • Wu NQ (1997) Avoiding deadlocks in automated manufacturing systems with shared material handling system. In: Proceedings of the 1997 IEEE International Conference on Robotics and Automation, Albuquerque, pp 2427–2433

  • Wu NQ (1999) Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model. IEEE Trans Syst Man Cybern Part C Appl Rev 29(2):192–204

    Article  Google Scholar 

  • Wu NQ, Zhou MC (2001) Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems. IEEE Trans Robot Autom 17(5):658–669

    Article  Google Scholar 

  • Wysk RA, Yang NS, Joshi S (1991) Detection of deadlocks in flexible manufacturing cells. IEEE Trans Robot Autom 7(6):853–859

    Article  Google Scholar 

  • Xing KY, Hu BS, Chen HX (1996) Deadlock avoidance policy for Petri net modeling of flexible manufacturing systems with shared resources. IEEE Trans Automat Contr 41(2):289–295

    Article  Google Scholar 

  • Yoon HJ, Lee DY (2001) Identification of potential deadlock set in semiconductor track systems. In: Proceedings of the 2001 IEEE International Conference on Robotics and Automation, Seoul, 1820–1825

  • Yoon HJ, Lee DY (2004) Deadlock-free scheduling of photolithography equipment in semiconductor fabrication. IEEE Trans Semicond Manuf 17(1):42–54

    Article  Google Scholar 

  • Zhou MC, DiCesare F (1992) A hybrid methodology for synthesis of Petri nets for manufacturing systems. IEEE Trans Robot Autom 18(3):350–361

    Article  Google Scholar 

  • Zhou MC, Venkatesh K (1998) Modeling, simulation and control of flexible manufacturing systems: Petri net approach. World Scientific, Singapore

    Google Scholar 

Download references

Acknowledgements

This work was supported in part by the Chinese National Science Foundation under Grant 60574066 and by the National Outstanding Young Scientist Research Awards under Grant 60228004.

Author information

Authors and Affiliations

  1. Department of Mechatronics Engineering, Guangdong University of Technology, Guangzhou, 510090, People’s Republic of China

    Naiqi Wu

  2. Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, 07102-1982, USA

    MengChu Zhou

Authors
  1. Naiqi Wu
    View author publications

    You can also search for this author inPubMed Google Scholar

  2. MengChu Zhou
    View author publications

    You can also search for this author inPubMed Google Scholar

Corresponding author

Correspondence to Naiqi Wu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wu, N., Zhou, M. Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets. OR Spectrum 29, 421–443 (2007). https://doi.org/10.1007/s00291-006-0046-3

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00291-006-0046-3

Keywords